Chemicapacitive Microsensors for Chemical Warfare Agent and Toxic Industrial Chemical Detection

Todd E Mlsna; Sabina Cemalovic; Manna Warburton; Stephen Hobson; Debra A Mlsna; Sanjay V Patel

doi:10.1016/j.snb.2005.12.066

Chemicapacitive Microsensors for Chemical Warfare Agent and Toxic Industrial Chemical Detection

Todd E Mlsna, Sabina Cemalovic, Manna Warburton, Stephen Hobson, Debra A Mlsna, Sanjay V Patel

School of Health Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

Detection of chemical warfare agents and toxic industrial chemicals using Microfabrication and microelectromechanical systems (MEMS) chemicapactive sensors is described. Our sensor chips consist of 10 parallel plates or interdigitated capacitors with an absorbant dielectric material to measure the dielectric constant of an array of selectively absorbing materials. The dielectric permittivity of these polymer filled chemicapacitors changes upon adsorption and desorption of the chemical vapors. Gaseous analytes including chemical warfare agents (CWAs) and toxic industrial chemicals (TICs) have been exposed to our sensors with the results being displayed and discussed below. Sensor performance was characterized through exposure to various CWAs and TICs over a range of concentrations. The limits of detection (LOD) were determined for several chemicals.

Original language	American English
Journal	Sensors and Actuators B: Chemical
Volume	116
DOIs	https://doi.org/10.1016/j.snb.2005.12.066
State	Published - Jul 2006

Keywords

Chemical warfare agent
Toxic industrial chemical
MEMS
Capacitance
Permittivity
Polymer
Sensor
Array

Disciplines

Chemistry

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Cite this

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title = "Chemicapacitive Microsensors for Chemical Warfare Agent and Toxic Industrial Chemical Detection",

abstract = " Detection of chemical warfare agents and toxic industrial chemicals using Microfabrication and microelectromechanical systems (MEMS) chemicapactive sensors is described. Our sensor chips consist of 10 parallel plates or interdigitated capacitors with an absorbant dielectric material to measure the dielectric constant of an array of selectively absorbing materials. The dielectric permittivity of these polymer filled chemicapacitors changes upon adsorption and desorption of the chemical vapors. Gaseous analytes including chemical warfare agents (CWAs) and toxic industrial chemicals (TICs) have been exposed to our sensors with the results being displayed and discussed below. Sensor performance was characterized through exposure to various CWAs and TICs over a range of concentrations. The limits of detection (LOD) were determined for several chemicals.",

keywords = "Chemical warfare agent, Toxic industrial chemical, MEMS, Capacitance, Permittivity, Polymer, Sensor, Array",

author = "Mlsna, {Todd E} and Sabina Cemalovic and Manna Warburton and Stephen Hobson and Mlsna, {Debra A} and Patel, {Sanjay V}",

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language = "American English",

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journal = "Sensors and Actuators B: Chemical",

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T1 - Chemicapacitive Microsensors for Chemical Warfare Agent and Toxic Industrial Chemical Detection

AU - Mlsna, Todd E

AU - Cemalovic, Sabina

AU - Warburton, Manna

AU - Hobson, Stephen

AU - Mlsna, Debra A

AU - Patel, Sanjay V

PY - 2006/7

Y1 - 2006/7

N2 - Detection of chemical warfare agents and toxic industrial chemicals using Microfabrication and microelectromechanical systems (MEMS) chemicapactive sensors is described. Our sensor chips consist of 10 parallel plates or interdigitated capacitors with an absorbant dielectric material to measure the dielectric constant of an array of selectively absorbing materials. The dielectric permittivity of these polymer filled chemicapacitors changes upon adsorption and desorption of the chemical vapors. Gaseous analytes including chemical warfare agents (CWAs) and toxic industrial chemicals (TICs) have been exposed to our sensors with the results being displayed and discussed below. Sensor performance was characterized through exposure to various CWAs and TICs over a range of concentrations. The limits of detection (LOD) were determined for several chemicals.

AB - Detection of chemical warfare agents and toxic industrial chemicals using Microfabrication and microelectromechanical systems (MEMS) chemicapactive sensors is described. Our sensor chips consist of 10 parallel plates or interdigitated capacitors with an absorbant dielectric material to measure the dielectric constant of an array of selectively absorbing materials. The dielectric permittivity of these polymer filled chemicapacitors changes upon adsorption and desorption of the chemical vapors. Gaseous analytes including chemical warfare agents (CWAs) and toxic industrial chemicals (TICs) have been exposed to our sensors with the results being displayed and discussed below. Sensor performance was characterized through exposure to various CWAs and TICs over a range of concentrations. The limits of detection (LOD) were determined for several chemicals.

KW - Chemical warfare agent

KW - Toxic industrial chemical

KW - MEMS

KW - Capacitance

KW - Permittivity

KW - Polymer

KW - Sensor

KW - Array

UR - https://doi.org/10.1016/j.snb.2005.12.066

U2 - 10.1016/j.snb.2005.12.066

DO - 10.1016/j.snb.2005.12.066

M3 - Article

VL - 116

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

ER -

Chemicapacitive Microsensors for Chemical Warfare Agent and Toxic Industrial Chemical Detection

Abstract

Keywords

Disciplines

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